Influence of elastic strains on the mask ratio in glassy polymer nanoimprint

Applied Physics Letters

Volumn 86, Issue 8, 2005, Pages 1-3

  Cross, Graham L W ^a   O'Connell, Barry S ^a   Pethica, John B ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTICITY; INDENTATION; ION BEAMS; MASKS; NANOTECHNOLOGY; SILICON; SINGLE CRYSTALS; STRAIN; THIN FILMS;

DEPTH SENSING; ELASTIC STRAIN; FOCUSED ION BEAMS (FIB); GLASSY POLYMER NANOIMPRINT;

POLYMERIC GLASS;

EID: 17044413748     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1868074     Document Type: Article

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