SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 107-111

Ion beam deposited carbon nitride films: Characterization and identification of chemical sputtering

(4) Hammer, P a Baker, M A a Lenardi, C a Gissler, W a

a JOINT RESEARCH CENTRE (Italy)

Author keywords

Carbon nitride; Chemical sputtering; Nanoindentation; X ray photoelectron spectroscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; ELECTRON ENERGY LEVELS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; HARDNESS; ION BEAMS; ION BOMBARDMENT; NITROGEN; SPUTTER DEPOSITION;

CARBON NITRIDE; GAS ANALYZER; NANOINDENTATION;

THIN FILMS;

EID: 0030415484 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09061-X Document Type: Article

Times cited : (99)

References (16)

1
- 0042059097
- A.Y. Liu and M. Cohen, Phys. Rev. B, 41 (1990) 10727.
- (1990) Phys. Rev. B , vol.41 , pp. 10727
- Liu, A.Y.¹ Cohen, M.²

2
- 0028732662
- F. Rossi, B. André, A. van Veen, P.E. Mijnarends, H. Shut, F. Labohom, M.P. Delplancke, H. Dunlop and E. Anger, Thin Solid Films, 253 (1994) 85.
- (1994) Thin Solid Films , vol.253 , pp. 85
- Rossi, F.¹ André, B.² Van Veen, A.³ Mijnarends, P.E.⁴ Shut, H.⁵ Labohom, F.⁶ Delplancke, M.P.⁷ Dunlop, H.⁸ Anger, E.⁹

3
- 0028729965
- D. Li, E. Cutiongco, Y.W. Chung, M.S. Wong and W. Sproul, Surf. Coatings Technol., 68/69 (1994) 611.
- (1994) Surf. Coatings Technol. , vol.68-69 , pp. 611
- Li, D.¹ Cutiongco, E.² Chung, Y.W.³ Wong, M.S.⁴ Sproul, W.⁵

4
- 84907009269
- K.J. Boyd, D. Marton, S.S. Todorov, A.H. Al-Bayati, J. Kulik, R.A. Zuhr and J.W. Rabalais, J. Vac. Sc. Technol., A13 (4) (1995) 2110.
- (1995) J. Vac. Sc. Technol. , vol.A13 , Issue.4 , pp. 2110
- Boyd, K.J.¹ Marton, D.² Todorov, S.S.³ Al-Bayati, A.H.⁴ Kulik, J.⁵ Zuhr, R.A.⁶ Rabalais, J.W.⁷

5
- 0342945364
- H. Sjöström, S. Stafström, M. Boman and J.E. Sundgren, Phys. Rev. Lett., 75/77 (1995) 1336.
- (1995) Phys. Rev. Lett. , vol.75-77 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.E.⁴

6
- 0029219919
- J. Rivière, D. Texier, J. Delafond, M. Jaouen, E.L. Mathé and J. Chaumont, Mater. Lett., 22 (1995) 115.
- (1995) Mater. Lett. , vol.22 , pp. 115
- Rivière, J.¹ Texier, D.² Delafond, J.³ Jaouen, M.⁴ Mathé, E.L.⁵ Chaumont, J.⁶

7
- 0027626327
- C. Niu, Y.Z. Lu and C.M. Lieber, Science, 261 (1993) 334.
- (1993) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

8
- 24544461001
- K.M. Yu, M.L. Cohen, E.E. Haller, W.H. Hansen, A.Y. Liu and I.C. Wu, Phys. Rev., B49 (1994) 5034.
- (1994) Phys. Rev. , vol.B49 , pp. 5034
- Yu, K.M.¹ Cohen, M.L.² Haller, E.E.³ Hansen, W.H.⁴ Liu, A.Y.⁵ Wu, I.C.⁶

9
- 14544291881
- S.S. Todorov, D. Marton, K.J. Loyd, A. Al-Bayati and J.W. Rabalais, J. Vac. Sci. Technol., A12 (6) (1994) 3192.
- (1994) J. Vac. Sci. Technol. , vol.A12 , Issue.6 , pp. 3192
- Todorov, S.S.¹ Marton, D.² Loyd, K.J.³ Al-Bayati, A.⁴ Rabalais, J.W.⁵

10
- 58149323101
- N.V. Novikov, M.A. Voronkin, A.A. Semekhov, N.I. Zaika and A.P. Zakharchuk, Diamond Related Mater., 4 (1994) 390.
- (1994) Diamond Related Mater. , vol.4 , pp. 390
- Novikov, N.V.¹ Voronkin, M.A.² Semekhov, A.A.³ Zaika, N.I.⁴ Zakharchuk, A.P.⁵

11
- 33947094490
- J.A. Taylor, G.M. Lancester and J.W. Rabalais, J. Amer. Chem. Soc., 100 (1978) 4441.
- (1978) J. Amer. Chem. Soc. , vol.100 , pp. 4441
- Taylor, J.A.¹ Lancester, G.M.² Rabalais, J.W.³

12
- 0001245503
- P. Hammer and W. Gisslet, Diamond Related Mater., 5 (1996) 1152.
- (1996) Diamond Related Mater. , vol.5 , pp. 1152
- Hammer, P.¹ Gisslet, W.²

13
- 0042823757
- M.A. Baker, P. Hammer and W. Gissler, submitted to Surface and Interface Anal.
- Surface and Interface Anal.
- Baker, M.A.¹ Hammer, P.² Gissler, W.³

14
- 84974183414
- M.F. Doerner and G.M. Nix, J. Mater. Res., 1 (1986) 601.
- (1986) J. Mater. Res. , vol.1 , pp. 601
- Doerner, M.F.¹ Nix, G.M.²

15
- 0000235265
- J.P. Biersack and G.L. Haggmark, Nucl. Instrum. Meth. 174 (1980) 257.
- (1980) Nucl. Instrum. Meth. , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, G.L.²

16
- 0028419280
- W. Gissler, P. Hammer and J. Haupt., Diamond Related Mater., 3 (1994) 770.
- (1994) Diamond Related Mater. , vol.3 , pp. 770
- Gissler, W.¹ Hammer, P.² Haupt, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.