Characterization of C-N thin films deposited by reactive excimer laser ablation of graphite targets in nitrogen atmosphere

Thin Solid Films

Volumn 307, Issue 1-2, 1997, Pages 54-59

  Caricato, A P ^a   Leggieri, G ^a   Luches, A ^a   Perrone, A ^a   Gyorgy, E ^b   Mihailescu, I N ^b   Popescu, M ^b   Barucca, G ^c   Mengucci, P ^c   Zemek, J ^d   Trchova, M ^e  

^a UNIVERSITY OF SALENTO   (Italy)

^b INSTITUTE OF ATOMIC PHYSICS   (Romania)

^c UNIVERSITÀ POLITECNICA DELLE MARCHE   (Italy)

^d INSTITUTE OF PHYSICS   (Czech Republic)

^e CHARLES UNIVERSITY   (Czech Republic)

Author keywords

C N films; Nitrogen atmosphere; Polycrystalline structure

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; EXCIMER LASERS; GRAPHITE; LASER ABLATION; NITROGEN; PRESSURE EFFECTS; PROTECTIVE ATMOSPHERES; SILICON; SUBSTRATES; THIN FILMS;

CARBON NITRIDE; FLUENCE;

NITRIDES;

EID: 0031248001     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00296-4     Document Type: Article

References (32)

1. A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
2. A.Y. Liu, M.O. Cohen, Phys. Rev. B 41 (1990) 10727.
3. J. Ortega, O.F. Sunkey, Phys. Rev. B 51 (1995) 2624.
4. C.J. Torng, J. Silvertsen, J.h. Judy, C. Chang, J. Mater. Res. 5 (1990) 2490.
5. F. Fujimoto, K. Ogata, Jpn. J. Appl. Phys. 32 (1993) L420.
6. C. Niu, Y.Z. Lu, C.M. Lieber, Science 261 (1993) 334.
7. M.C. Polo, R. Aguiar, P. Serra, M. Varela, J. Esteve, Appl. Surf. Sci. 96-98 (1996) 870.
8. E. D'Anna, A. Luches, A. Perrone, S. Acquaviva, R. Alexandresdrescu, I.N. Mihailescu, J. Zemek, G. Majni, Appl. Surf. Sci. 106 (1996) 126.
9. L.R. Doolittle, Nuclear Instrum. Meth. B 9 (1995) 344.
10. J. Zemek, A. Luches, G. Leggieri, A. Fejfar, M. Trchova, J. Electron Spectrosc. Relat. Phen. 76 (1995) 747.
11. Z.M. Ren, Y.C. Du, Z.F. Ying, Y. Qiu, X.X. Xiong, J.D. Wu, F.M. Li, Appl. Phys. Lett. 65 (1994) 1361.
12. I. Gouzman, R. Brener, A. Hoffman, Thin Solid Films 253 (1994) 90.
13. D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov, J. W. Rabalais, Phys. Rev. Lett. 73 (1994) 118.
14. J. Feng, Y. Zheng, J. Xie, Mater. Lett. 27 (1996) 219.
15. L.C. Chen, C.Y. Yang, D.M. Bhusari, K.H. Chen, M.C. Lin, J.C. Lin, T.J. Chuang, Diamond Rel. Mater. 5 (1996) 514.
16. H.K. Woo, Y. Zhang, S.T. Lee, K.W. Wong, Diamond 96 Conf., Tours, 1996.
17. H. Sjostrom, S. Stafstrom, M. Boman, J.E. Sundgren, Phys. Rev. Lett. 75 (1995) 1336.
18. H. Sjostrom, L. Hultman, J.E. Sundgren, S.V. Hainsworth, T.F. Page, G.S.A.M. Theunissen, J. Vac. Sci. Technol. A. 14 (1996) 56.
19. N.V. Novikov, M.A. Voronkin, A.A. Smechnov, N.I. Zaika, A.P. Zacharchuk, Diamond Rel. Mater. 4 (1995) 3900.
20. J.H. Kaufman, S. Metin, D.D. Saperstein, Phys. Rev. B 39 (1989) 13053.
21. Y. Bounouh, L. Chah, A. Sadki, M.L. Theye, C. Cardinaud, M. Zarrabian, J.L. Fave, J. Cernogora, K. Zellama, J. von Bardeleben, Diam. Relat. Mater. 4 (1995) 492.
22. B. Jonsson, S. Hogmark, Thin Solid Films 114 (1984) 114.
23. R. Kelly, A. Miotello, Appl. Surf. Sci. 96-98 (1996) 205.
24. A. Luches, A.P. Caricato, G. Leggieri, M. Martino, A. Perrone, G. Barucca, P. Mengucci, J. Zemek, Proc. Society of Photo-Optical Instrumentation Engineers 2789 (1996) 293.
25. F. Fuso, L.N. Vyacheslavov, G. Lorenzi, M. Allegrini, E. Arimondo, Appl. Surf. Sci. 96-98 (1996) 181.
26. M. Aden, E.W. Kreutz, Appl. Surf. Sci. 96-98 (1996) 39.
27. A. Gorbunov, V. Konov, Proc. Conf. on Laser Advanced Materials Processing (Nagaoka, 1992) p. 1061.
28. H. Mauro, I. Miyamoto, T. Ooie, Proc. Conf. on Laser Advanced Materials Processing (Nagaoka, 1992) p. 293.
29. D. Craciun, V. Craciun, NATO ASI Series E, Appl. Phys. 284 (1992) 67.
30. S.I. Anisimov, D. Bauerle, B.S. Luk'yanchuk, Phys. Rev. B 48 (1993) 67.
31. S.I. Anisimov, B.S. Luk'yanchuk, A. Luches, JETP 81 (1985) 129.
32. Y. Guo, W.A. Goddard III, Chem. Phys. Lett. 237 (1995) 72.