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Volumn 33, Issue 5 I, 2005, Pages 1618-1625

Magnetic control in vacuum arc deposition: A review

Author keywords

Cathode spots; Macroparticle filtering; Magnetic collimation; Magnetic steering; Retrograde motion; Vacuum arc; Vacuum arc deposition

Indexed keywords

CATHODES; ELECTRIC ARCS; FILTRATION; MAGNETIC FIELD EFFECTS; MAGNETIC VARIABLES CONTROL; PLASMA FLOW; VACUUM APPLICATIONS;

EID: 27744608484     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.856532     Document Type: Review
Times cited : (44)

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