Magnetic control in vacuum arc deposition: A review

IEEE Transactions on Plasma Science

Volumn 33, Issue 5 I, 2005, Pages 1618-1625

  Boxman, Raymond L ^a   Beilis, Isak I ^a   Gidalevich, Evgeny ^a   Zhitomirsky, Vladimir N ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Cathode spots; Macroparticle filtering; Magnetic collimation; Magnetic steering; Retrograde motion; Vacuum arc; Vacuum arc deposition

Indexed keywords

CATHODES; ELECTRIC ARCS; FILTRATION; MAGNETIC FIELD EFFECTS; MAGNETIC VARIABLES CONTROL; PLASMA FLOW; VACUUM APPLICATIONS;

CATHODE SPOTS; MACROPARTICLE FILTERING; MAGNETIC COLLIMINATION; MAGNETIC STEERING; RETROGRADE MOTION; VACUUM ARC; VACUUM ARC DEPOSITION;

PLASMA JETS;

EID: 27744608484     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.856532     Document Type: Review

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