Superposition of two plasma beams produced in a vacuum arc deposition apparatus

IEEE Transactions on Plasma Science

Volumn 27, Issue 4, 1999, Pages 1049-1054

  Zhitomirsky, Vladimir N ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CATHODES; ELECTRIC ARCS; ION IMPLANTATION; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; NITRIDES; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA FLOW; PLASMA JETS; PROTECTIVE COATINGS;

MAGNETIZED PLASMA DUCT; PLASMA ARC DEVICE; PLASMA BEAM; PLASMA MEASUREMENT; VACUUM ARC;

PLASMA DEVICES;

EID: 0033321091     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.782280     Document Type: Article

References (14)

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