Macroparticle separation and plasma collimation in positively biased ducts in filtered vacuum arc deposition systems

Journal of Applied Physics

Volumn 85, Issue 3, 1999, Pages 1358-1365

  Beilis, I I ^a   Keidar, M ^a,b   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001752464     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369267     Document Type: Article

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