Propagation of vacuum arc plasma beam in a toroidal filter

IEEE Transactions on Plasma Science

Volumn 24, Issue 6, 1996, Pages 1371-1377

  Alterkop, Boris A ^a   Zhitomirsky, Vladimir N ^a   Goldsmith, Samuel ^a   Boxman, Raymond L ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTRONS; IONIZATION; IONS; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA COLLISION PROCESSES; PLASMA FLOW; VACUUM; WAVE PROPAGATION;

CENTRIFUGAL FORCE; ELECTRON ION COLLISIONS; MAGNETIC FORCE; PLASMA BEAM TRANSPORT; TOROIDAL MAGNETIC FILTER;

PLASMA WAVES;

EID: 0030398135     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.553203     Document Type: Article

References (17)

1. R.L. Boxman and S. Goldsmith, Principles and applications of vacuum arc coatings, IEEE Trans. Plasma Sei., vol. 17, pp. -705-712, 1989.
2. D.M. Sanders, D.B. Boercker, and S. Falabella, Coating technology based on the vacuum arc-A review, IEEE Trans. Plasma Sci., vol. 18, pp. 883-894, 1990.
3. R.L. Boxman and S. Goldsmith, Macroparticle contamination in cathodic arc coatings: Generation, transport, and control, Surface Coating Technol, vol. 52, pp. 39-50, 1992.
4. I.I. Aksenov, V.A. Belous, V. G. Padalka, and V. M. Khoroshikh, Transport of plasma streams in a curvilinear plasma-optics system, Sov. J. Plasma Phys., vol. 4, pp. 425-428, 1978.
5. I.I. Aksenov, V.G. Padalka, N. S. Repalov, and V. M. Khoroshikh, Motion of plasma streams in a curvilinear plasma-optics system, Sov. J. Plasma Phys., vol. 6, pp. 173-176, 1980.
6. J. Storer, J.E. Galvin, and G. Brown, Transport of vacuum arc plasma through straight and'curved magnetic ducts, J. Appl. Phys., vol. 66, pp. 5245-5250, 1989.
7. V.N. Zhitomirsky, R.L. Boxman, and S. Goldsmith, Influence of an external magnetic field on cathode spot motion and coating deposition using filtered vacuum arc evaporation, Surface Coating Technol, vol. 68/69, pp. 146-151, 1994.
8. D.B. Boercker, D.M. Sanders, J. Storer, and S. Falabella, Modeling plasma flow in straight and curved duct, J. Appl. Phys., vol. 69, pp. 115-120, 1991.
9. V.N. Zhitomirsky, L. Kaplan, R.L. Boxman, and S. Goldsmith, Ion current distribution in a filtered vacuum arc deposition system, Surface Coating Technol, vol. 76/77, pp. 190-196, 1995.
10. A. Anders, S. Anders, and I.G. Brown, Transport of vacuum arc plasmas through magnetic macroparticle filters, Plasma Sources Sci. Technol, vol. 4, pp. 1-12, 1995.
11. B. Alterkop, E. Gidalevich, S. Goldsmith, and R.L. Boxman, Vacuum arc plasma jet propagation in a toroidal duct, J. Appl. Phys., vol. 79, pp. 6791-6802, 1996.
12. W.D. Davis and H.C. Miller, Analysis of the electrode products emitted by dc arcs in a vacuum ambient, J. Appl Phys., vol. 40, pp. 2212-2221, 1969.
13. J. Kutzner and H.C. Miller, Integrated ion flux emitted from the cathode spot region of a diffuse vacuum arc, J. Phys. D: Appl. Phys., vol. 25, pp. 686-693, 1992.
14. F.F. Chen, Introduction to Plasma Physics. New York: Plenum, 1984.
15. C.A. Davis, Plasma transport and film deposition in the filtered cathodic arc, Ph.D. dissertation, Univ. of Sydney, Australia, 1993, p. 47.
16. V. Veerasamy, Tetrahedral amorphous carbon: Deposition, characterization and electronic properties, Ph.D. dissertation, Cambridge Univ., UK, 1994.
17. V.N. Zhitomirsky, R.L. Boxman, and S. Goldsmith, Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system, in Proc. XVIInt. Symp. Discharges Electrical Insulations Vacuum, Berkeley, CA, June 1996.