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Volumn 13, Issue 18, 2001, Pages 1386-1389
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Capillary force lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CAPILLARITY;
DENSITY (SPECIFIC GRAVITY);
FREE ENERGY;
INTEGRATED CIRCUIT MANUFACTURE;
NUMERICAL METHODS;
ORGANIC POLYMERS;
PLASTIC FILMS;
SCANNING ELECTRON MICROSCOPY;
SURFACE TENSION;
VISCOSITY;
WETTING;
CAPILLARY FORCE LITHOGRAPHY;
LARGE AREA PATTERNING;
PHOTOLITHOGRAPHY;
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EID: 0035860303
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-4095(200109)13:18<1386::AID-ADMA1386>3.0.CO;2-X Document Type: Article |
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Times cited : (410)
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References (12)
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