Unconventional patterning with A modulus-tunable mold: From imprinting to microcontact printing

Chemistry of Materials

Volumn 16, Issue 24, 2004, Pages 5000-5005

  Yoo, Pil J ^a   Choi, Se Jin ^b   Kim, Joon H ^a   Suh, Dongchul ^a   Baek, Seung J ^b   Kim, Tae W ^b   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

^b Minuta Tech   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; MODULATORS; PRINTING; ULTRAVIOLET RADIATION;

ACRYLATE MODULATORS; CHEMICAL PATTERNING; PATTERNING TECHNIQUES; SUBMICROMETER PATTERNS;

MOLDING;

ACRYLIC ACID; DIMETICONE; ELASTOMER; POLYSTYRENE; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL STRUCTURE; CROSS LINKING; GLASS TRANSITION TEMPERATURE; LITHOGRAPHY; NANOTECHNOLOGY; PRINTING; SCANNING ELECTRON MICROSCOPY; TENSILE STRENGTH; ULTRAVIOLET RADIATION;

EID: 9244242087     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm049068u     Document Type: Article

References (37)

1. Service, R. F. Science 1998, 281, 893-894.
2. Koch, S. W.; Knorr, A. Science 2001, 293, 2217-2218.
3. Moreau, W. M. Semiconductor Lithography: Principles and Materials; Plenum: New York, 1988.
4. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Appl. Phys. Lett. 1995, 67, 3114-3116.
5. Xia, Y.; Whitesides, G. M. Angew. Chem., Int. Ed. 1998, 37, 550-575.
6. Xia, Y.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M. Chem. Rev. 1999, 99, 1823-1848.
7. Chou, S. Y.; Krauss, P. R.; Zhang, W.; Guo, L. J.; Zhuang, L. J. Vac. Sci. Technol. B 1997, 15, 2897-2904.
8. Kumar, A.; Whitesides, G. M. Science 1994, 263, 60-62.
9. Love, J. C.; Wolfe, D. B.; Chabinuc, M. L.; Paul, K. E.; Whitesides, G. M. J. Am. Chem. Soc. 2002, 124, 1576-1577.
10. Xia, Y.; Zhao, X. M.; Kim, E.; Whitesides, G. M. Chem. Mater. 1995, 7, 2332-2337.
11. Delamarche, E.; Schmid, H.; Michel, B.; Biebuyck, H. Adv. Mater. 1997, 9, 741-746.
12. Hui, C. Y.; Jagota, A.; Lin, Y. Y.; Kramer, E. J. Langmuir 2002, 18, 1394-1407.
13. Bailey, T.; Choi, B. J.; Colburn, M.; Meissl, M.; Shaya, S.; Ekerdt, J. G.; Wilson, C. G. J. Vac. Sci. Technol. B 2000, 18, 3572-3577.
14. Khang, D. Y.; Kang, H.; Kim, T. I.; Lee, H. H. Nano Lett. 2004, 4, 633-637.
15. Schmid, H.; Michel, B. Macromolecules 2000, 33, 3042-3049.
16. Odom, Y. W.; Love, J. C.; Wolfe, D. B., Paul, K. E.; Whitesides, G. M. Langmuir 2002, 18, 5314-5320.
17. Gates, B. D.; Whitesides, G. M. J. Am. Chem. Soc. 2003, 125, 14986-14987.
18. Csucs, G.; Kunzler, T.; Feldman, K.; Robin, F.; Spencer, N. D. Langmuir 2003, 19, 6104-6109.
19. Trimbach, D.; Feldman, K.; Spencer, N. D.; Broer, D. J.; Bastiaansen, C. W. M. Langmuir 2003, 19, 10957-10961.
20. Choi, S. J.; Yoo, P. J.; Baek, S. J.; Kim, T. W.; Lee, H. H. J. Am. Chem. Soc. 2004, 126, 7744-7745.
21. Struck, S.; Heilen, W. Tego Journal, 2nd ed.; Tego Chemie Service GmbH: Essen, Germany, 2002; pp 68-70.
22. Kumar, A.; Biebuyck, H. A.; Abbott, N. L.; Whitesides, G. M. J. Am. Chem. Soc. 1992, 114, 9188-9189.
23. Kumar, A.; Biebuyck, H. A.; Whitesides, G. M. Langmuir 1994, 10, 1498-1511.
24. Roffey, C. G. Photogeneration of Reactive Species for UV Curing; John Wiley & Sons: New York, 1997.
25. Decker, C. Macromol. Rapid Commun. 2002, 23, 1067-1093.
26. Barber, J. R. Elasticity; Kluwer Academic Publishers: Dordrecht, The Netherlands, 1992.
27. Description can be found on the webpage of the American Society for Testing and Materials, http://www.astm.org.
28. Choi, K. M.; Rogers, J. A. J. Am. Chem. Soc. 2003, 125, 4060-4061.
29. Xia, Y.; Whitesides, G. M. J. Am. Chem. Soc. 1995, 117, 3274-3275.
30. Suh, K. Y.; Langer, R.; Lahann, J. Appl. Phys. Lett. 2003, 83, 4250-4252.
31. Geissler, M.; Wolf, H.; Stutz, R.; Delamarche, E.; Grummt, U. W.; Michel, B.; Bietsch, A. Langmuir 2003, 19, 6301-6311.
32. Li, H. W.; Muir, B. V. O.; Fichet, G.; Huck, W. T. S. Langmuir 2003, 19, 1963-1965.
33. Biebuyck, H. A.; Larsen, N. B.; Delamarche, E.; Michel, B. IBM J. Res. Dev. 1997, 41, 159-170.
34. Delamarche, E.; Schmid, H.; Bietsch, A.; Larsen, N. B.; Rothuizen, H.; Michel, B.; Biebuyck, H. J. Phys. Chem. B 1998, 102, 3324-3334.
35. Libioulle, L.; Bietsh, A.; Schmid, H.; Michel, B.; Delamarche, E. Langmuir 1999, 15, 300-304.
36. Liebau, M.; Huskens, J.; Reinhoudt, D. N. Adv. Funct. Mater. 2001, 11, 147-150.
37. Li, H.; Kang, D. J.; Blamire, M. G.; Huck, W. T. S. Nano Lett. 2002, 2, 347-349.