Imprint of sub-25 nm vias and trenches in polymers

Applied Physics Letters

Volumn 67, Issue , 1995, Pages 3114-

  Chou, Stephen Y ^a   Krauss, Peter R ^a   Renstrom, Preston J ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0142037327     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.114851     Document Type: Article

References (6)