Change of acceleration behavior of time-dependent dielectric breakdown by the beol process: Indications for hydrogen induced transition in dominant degradation mechanism

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 388-397

  Pompl, T ^a   Allers, K H ^a   Schwab, R ^a   Hofmann, K ^a   Roehner, M ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACK END OF LINE (BEOL); DIELECTRIC BREAKDOWN; HYDROGEN REACTION MODEL; TIME DEPENDENCES;

ACCELERATION; CORRELATION METHODS; HYDROGEN; MATHEMATICAL MODELS;

DIELECTRIC MATERIALS;

EID: 24144462317     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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