Disturbed bonding states in SiO2 thin-films and their impact on time-dependent dielectric breakdown

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1998, Pages 47-56

  McPherson, J W ^a   Mogul, H C ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CHEMICAL BONDS; CRYSTAL DEFECTS; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC FIELD EFFECTS; SILICA;

TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB);

THIN FILMS;

EID: 0031649404     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)