New sterically hindered Hf, Zr and Y β-diketonates as MOCVD precursors for oxide films

Journal of Materials Chemistry

Volumn 14, Issue 8, 2004, Pages 1245-1251

  Pasko, Sergej V ^a,b   Hubert Pfalzgraf, Liliane G ^a   Abrutis, Adulfas ^b   Richard, Philippe ^c   Bartasyte, Ausrine ^b   Kazlauskiene, Vida ^b  

^a UNIVERSITÉ LYON 1   (France)

^b VILNIUS UNIVERSITY   (Lithuania)

^c UNIVERSITÉ DE BOURGOGNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; HAFNIUM COMPOUNDS; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION; YTTRIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

ANTIPRISMATIC GEOMETRY; METAL DISPLAYS; PULSED LIQUID INJECTION; SINGLE-CRYSTAL X-RAY DIFFRACTION;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

KETONE DERIVATIVE; OXIDE; ZIRCONIUM;

ANALYTIC METHOD; ARTICLE; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; ELECTRON SPIN RESONANCE; FILM; GROWTH RATE; INFRARED SPECTROSCOPY; INJECTION; LIQUID; MOLECULAR DYNAMICS; MOLECULAR STABILITY; PROTON NUCLEAR MAGNETIC RESONANCE; SEMICONDUCTOR; STRUCTURE ANALYSIS; SYNTHESIS; TEMPERATURE; X RAY DIFFRACTION;

EID: 2042513615     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/b401052c     Document Type: Article

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