Preparation and Structural Characterization of, and Chemical Vapor Deposition Studies with, Certain Yttrium Tris(β-Diketonate) Compounds

Chemical Vapor Deposition

Volumn 2, Issue 4, 1996, Pages 149-161

  Luten, Henry A ^a   Rees Jr , William S ^a   Goedken, Virgil L ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b FLORIDA STATE UNIVERSITY   (United States)

Author keywords

CVD; Yttria; Yttrium; Diketonate compounds

Indexed keywords

EID: 0000618249     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.19960020405     Document Type: Article

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57. Based on prices listed in the Aldrich catalog. Eq. 1 = $79.43/mol; Eq. 2 = $46.57/mol. We gratefully acknowledge an anonymous reviewer for pointing out that, perhaps, this alternative route also has been employed by other researchers, subsequent to the initial publication.