MOCVD of zirconia thin films by direct liquid injection using a new class of zirconium precursor

Chemical Vapor Deposition

Volumn 4, Issue 2, 1998, Pages 46-49

  Jones, A C ^a   Leedham, T J ^a   Wright, P J ^a   Crosbie, M J ^a   Lane, P A ^a   Williams, D J ^a   Fleeting, K A ^a   Otway, D J ^a   O'Brien, P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; THIN FILMS; TRANSPORT PROPERTIES; ZIRCONIA;

DIRECT LIQUID INJECTION;

DIELECTRIC FILMS;

EID: 0032027493     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199803)04:02<46::AID-CVDE46>3.0.CO;2-1     Document Type: Article

References (18)