Zirconia coatings realized by microwave plasma-enhanced chemical vapor deposition

Thin Solid Films

Volumn 292, Issue 1-2, 1997, Pages 241-246

  Bertrand, G ^a,b   Mevrel R ^a  

^a ONERA   (France)

^b LMIT   (France)

Author keywords

Chemical vapour deposition; Plasma processing and deposition; Zirconium oxide

Indexed keywords

AIRFOILS; COATINGS; GAS TURBINES; MORPHOLOGY; PLASMA APPLICATIONS; PLASMAS; STRUCTURE (COMPOSITION); ZIRCONIA;

DEPOSITION RATE; MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; OPTICAL EMISSION SPECTROSCOPY; THERMAL BARRIER COATINGS;

CHEMICAL VAPOR DEPOSITION;

EID: 0031553456     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09099-2     Document Type: Article

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