Precision MEMS flexure mount for a Littman tunable external cavity laser

IEE Proceedings: Science, Measurement and Technology

Volumn 151, Issue 2, 2004, Pages 67-75

  Huang, W ^a   Syms, R R A ^a   Stagg, J ^a   Lohmann, A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETRY; LASER TUNING; MICROOPTICS; MIRRORS; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS; SILICON ON INSULATOR TECHNOLOGY;

DEEP REACTIVE ION ETCHING; EXTERNAL CAVITY LASER; LITTMAN CONFIGURATION;

MICROELECTROMECHANICAL DEVICES;

EID: 16544376431     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040036     Document Type: Article

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