Optical performance of high-aspect LIGA gratings

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1367-1373

  Cox, J Allen ^a   Zook, J David ^a   Ohnstein, Thomas ^a   Dobson, David C ^b  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b TEXAS A AND M UNIVERSITY   (United States)

Author keywords

Diffractive optics; Grating; LIGA; Maxwell's equations; Micro opto electro mechanical systems; Tunable filter

Indexed keywords

EID: 1542584607     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601333     Document Type: Article

References (8)

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3. T. R. Ohnstein, J. D. Zook, and H. B. French, "Tunable IR filters with integral electromagnetic actuators," in Technical Digest of the 1996 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2-6, 1996 (in press).
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5. D. Dobson and J. A. Cox, "Mathematical modeling for diffractive optics," in Diffractive and Miniaturized Optics (Critical Reviews), Sing Lee, Ed., Proc. SPIE CR49, 32-53 (1994).
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7. E. D. Palik, Ed., Handbook of Optical Constants of Solids I, pp. 313-323, Academic Press, Orlando (1985).
8. P. M. Morse, Vibration and Sound, 2nd ed., pp. 255-258, McGraw-Hill, New York (1948).