A novel integrated micromachined tunable laser using polysilicon 3-D mirror

IEEE Photonics Technology Letters

Volumn 13, Issue 5, 2001, Pages 427-429

  Liu, A Q ^a   Zhang, X M ^a   Murukeshan, V M ^b   Lam, Y L ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

External cavity laser diode; Optical MEMS; Tunable laser; WDM

Indexed keywords

ACTUATORS; LASER RESONATORS; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL FIBERS; POLYSILICON; SEMICONDUCTOR DEVICE MANUFACTURE; WAVELENGTH DIVISION MULTIPLEXING;

EXTERNAL CAVITY LASER DIODE; INTEGRATED MICROMACHINED TUNABLE LASER; OPTICAL MICROELECTROMECHANICAL SYSTEMS; SINGLE MODE FABRY-PEROT LASER DIODE; THREE DIMENSIONAL MIRROR;

SEMICONDUCTOR LASERS;

EID: 0035333691     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.920739     Document Type: Article

References (11)

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