Tuning mechanism for a MEMS external cavity laser

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 183-184

  Syms, R R A ^a   Lohmann, A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; LIGHT AMPLIFIERS; MEMS; MOEMS; NANOCANTILEVERS; OPTICAL COLLIMATORS; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS; SEMICONDUCTOR OPTICAL AMPLIFIERS; SILICON ON INSULATOR TECHNOLOGY; TUNING;

BONDED SILICON-ON-INSULATOR MATERIALS; DEEP REACTIVE ION ETCHING; ELASTIC SUSPENSION; ELECTROSTATIC DRIVE; ELECTROSTATIC MEMS; EXTERNAL CAVITY LASERS; LITTROW CONFIGURATION; MODE-HOP-FREE TUNING;

LASER MIRRORS;

EID: 84963781938     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031503     Document Type: Conference Paper

References (3)

1. Mellis J., Al-Chalabi S.A. et al. "Miniature packaged external-cavity semiconductor laser with 50 GHz continuous electrical tuning range" Elect. Lett. 24, 988-989 (1988)
2. Favre F., Le Guen D. "82 nm of continuous tunability for an external cavity semiconductor laser" Elect. Lett. 27, 183-184 (1991)
3. Berger J.D. et al. "Widely tunable external cavity diode laser based on a MEMS electrostatic rotary actuator" presented at OFC 2001, Anaheim, CA, Mar. 17-22, Paper Tuj2 (2001)