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Journal of Applied Physics

Volumn 92, Issue 2, 2002, Pages 842-852

Atomic-scale analysis of deposition and characterization of a-Si:H thin films grown from SiH radical precursor

(3) Sriraman, Saravanapriyan a Aydil, Eray S a Maroudas, Dimitrios a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; ATOMIC HYDROGEN; ATOMIC-SCALE ANALYSIS; BOND DENSITIES; CHEMICAL CHARACTERIZATION; COLUMNAR STRUCTURES; DEPOSITED FILMS; DEVICE-QUALITY; ELEY-RIDEAL MECHANISM; EXPERIMENTAL MEASUREMENTS; GASPHASE; H-ABSTRACTION; HYDROGENATED AMORPHOUS SILICON FILMS; INTERSTITIAL HYDROGEN; MD SIMULATION; MOLECULAR DYNAMICS SIMULATIONS; MONOHYDRIDES; RADICAL PRECURSOR; REACTION PROBABILITY; SI(0 0 1); SI-SI BONDS; STRUCTURAL QUALITIES; SUBSURFACE LAYER; SURFACE ADSORPTION; SURFACE DANGLING BONDS; SURFACE HYDRIDES; SURFACE REACTIVITY;

ADSORPTION; CHEMICAL ANALYSIS; CHEMICAL BONDS; DANGLING BONDS; DEPOSITION; DESORPTION; DIAMOND FILMS; DISSOCIATION; FILM GROWTH; HYDRIDES; HYDROGEN; SURFACE MORPHOLOGY; SURFACE REACTIONS; THIN FILMS; VAPOR DEPOSITION; VISUALIZATION;

SILICON;

EID: 0037101023 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1483920 Document Type: Article

Times cited : (13)

References (52)

1
- 25344443782
- mbu MRSBEA 0883-7694
- W. C. Sinke, MRS Bull. 18, 18 (1993). mbu MRSBEA 0883-7694
- (1993) MRS Bull. , vol.18 , pp. 18
- Sinke, W.C.¹

2
- 0030525643
- psb PSSBBD 0370-1972
- C. Beneking, B. Rech, J. Foelsch, and H. Wagner, Phys. Status Solidi B 194, 41 (1996). psb PSSBBD 0370-1972
- (1996) Phys. Status Solidi B , vol.194 , pp. 41
- Beneking, C.¹ Rech, B.² Foelsch, J.³ Wagner, H.⁴

3
- 0000805728
- apa APSFDB 0721-7250
- J. R. Abelson, Appl. Phys. A: Solids Surf. 56, 493 (1993). apa APSFDB 0721-7250
- (1993) Appl. Phys. A: Solids Surf. , vol.56 , pp. 493
- Abelson, J.R.¹

4
- 0033618561
- sci SCIEAS 0036-8075
- A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, Science 285, 692 (1999). sci SCIEAS 0036-8075
- (1999) Science , vol.285 , pp. 692
- Shah, A.¹ Torres, P.² Tscharner, R.³ Wyrsch, N.⁴ Keppner, H.⁵

5
- 0000769887
- prb PRBMDO 0163-1829
- G. Ganguly and A. Matsuda, Phys. Rev. B 47, 3661 (1993). prb PRBMDO 0163-1829
- (1993) Phys. Rev. B , vol.47 , pp. 3661
- Ganguly, G.¹ Matsuda, A.²

6
- 0035334046
- jva JVTAD6 0734-2101
- W. M. M. Kessels, M. G. H. Boogaarts, J. P. M. Hoefnagels, D. C. Schram, and M. C. M. van de Sanden, J. Vac. Sci. Technol. A 19, 1027 (2001). jva JVTAD6 0734-2101
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 1027
- Kessels, W.M.M.¹ Boogaarts, M.G.H.² Hoefnagels, J.P.M.³ Schram, D.C.⁴ Van De Sanden, M.C.M.⁵

7
- 0000423901
- jaJAPIAU 0021-8979
- W. M. M. Kessels, J. P. M. Hoefnagels, M. G. H. Boogaarts, D. C. Schram, and M. C. M. van de Sanden, J. Appl. Phys. 89, 2065 (2001). jap JAPIAU 0021-8979
- (2001) J. Appl. Phys. , vol.89 , pp. 2065
- Kessels, W.M.M.¹ Hoefnagels, J.P.M.² Boogaarts, M.G.H.³ Schram, D.C.⁴ Van De Sanden, M.C.M.⁵

8
- 0035246796
- tsf THSFAP 0040-6090
- W. M. M. Kessels, A. H. M. Smets, D. C. Marra, E. S. Aydil, D. C. Schram, and M. C. M. van de Sanden, Thin Solid Films 383, 154 (2001). tsf THSFAP 0040-6090
- (2001) Thin Solid Films , vol.383 , pp. 154
- Kessels, W.M.M.¹ Smets, A.H.M.² Marra, D.C.³ Aydil, E.S.⁴ Schram, D.C.⁵ Van De Sanden, M.C.M.⁶

9
- 0034272583
- jva JVTAD6 0734-2101
- W. M. M. Kessels, M. C. M. van de Sanden, and D. C. Schram, J. Vac. Sci. Technol. A 18, 2153 (2000). jva JVTAD6 0734-2101
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2153
- Kessels, W.M.M.¹ Van De Sanden, M.C.M.² Schram, D.C.³

10
- 0001461620
- jaJAPIAU 0021-8979
- W. M. M. Kessels, M. C. M. van de Sanden, R. J. Severens, and D. C. Schram, J. Appl. Phys. 87, 3313 (2000). jap JAPIAU 0021-8979
- (2000) J. Appl. Phys. , vol.87 , pp. 3313
- Kessels, W.M.M.¹ Van De Sanden, M.C.M.² Severens, R.J.³ Schram, D.C.⁴

11
- 0000116833
- jnc JNCSBJ 0022-3093
- J. Perrin, J. Non-Cryst. Solids 137-138, 639 (1991). jnc JNCSBJ 0022-3093
- (1991) J. Non-cryst. Solids , vol.137-138 , pp. 639
- Perrin, J.¹

12
- 0026189910
- jjc JAPLD8 0021-4922
- K. Tachibana, T. Mukai, and H. Harima, Jpn. J. Appl. Phys., Part 2 30, L1208 (1991). jjc JAPLD8 0021-4922
- (1991) Jpn. J. Appl. Phys., Part 2 , vol.30 , pp. 1208
- Tachibana, K.¹ Mukai, T.² Harima, H.³

13
- 0000205152
- jch JPCHAX 0022-3654
- T. R. Dietrich, S. Chiussi, M. Marek, A. Roth, and F. J. Comes, J. Phys. Chem. 95, 9302 (1991). jch JPCHAX 0022-3654
- (1991) J. Phys. Chem. , vol.95 , pp. 9302
- Dietrich, T.R.¹ Chiussi, S.² Marek, M.³ Roth, A.⁴ Comes, F.J.⁵

14
- 0001841364
- sus SUSCAS 0039-6028
- A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, A. Yuuki, and J. Perrin, Surf. Sci. 227, 50 (1990). sus SUSCAS 0039-6028
- (1990) Surf. Sci. , vol.227 , pp. 50
- Matsuda, A.¹ Nomoto, K.² Takeuchi, Y.³ Suzuki, A.⁴ Yuuki, A.⁵ Perrin, J.⁶

15
- 0027831218
- and.
- A. Matsuda, G. Ganguly, and A. Suzuki, Bull. Electrotech. Lab. 57, 5 (1993).
- (1993) Bull. Electrotech. Lab. , vol.57 , pp. 5
- Matsuda, A.¹ Ganguly, G.² Suzuki, A.³

16
- 36549092725
- jcJCPSA6 0021-9606
- R. Robertson and A. Gallagher, J. Chem. Phys. 85, 3623 (1986). jcp JCPSA6 0021-9606
- (1986) J. Chem. Phys. , vol.85 , pp. 3623
- Robertson, R.¹ Gallagher, A.²

17
- 0347387997
- jaJAPIAU 0021-8979
- R. Robertson and A. Gallagher, J. Appl. Phys. 59, 3402 (1986). jap JAPIAU 0021-8979
- (1986) J. Appl. Phys. , vol.59 , pp. 3402
- Robertson, R.¹ Gallagher, A.²

18
- 0032326576
- jva JVTAD6 0734-2101
- A. Matsuda, J. Vac. Sci. Technol. A 16, 365 (1998). jva JVTAD6 0734-2101
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 365
- Matsuda, A.¹

19
- 0000079923
- ack ACHEAT 0065-2377
- D. Maroudas, Adv. Chem. Eng. 28, 251 (2001). ack ACHEAT 0065-2377
- (2001) Adv. Chem. Eng. , vol.28 , pp. 251
- Maroudas, D.¹

20
- 0043218362
- apl APPLAB 0003-6951
- S. Ramalingam, D. Maroudas, and E. S. Aydil, Appl. Phys. Lett. 72, 578 (1998). apl APPLAB 0003-6951
- (1998) Appl. Phys. Lett. , vol.72 , pp. 578
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

21
- 0001599763
- jaJAPIAU 0021-8979
- S. Ramalingam, D. Maroudas, and E. S. Aydil, J. Appl. Phys. 86, 2872 (1999). jap JAPIAU 0021-8979
- (1999) J. Appl. Phys. , vol.86 , pp. 2872
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

22
- 0001108491
- jaJAPIAU 0021-8979
- S. Ramalingam, P. Mahalingam E. S. Aydil, and D. Maroudas, J. Appl. Phys. 86, 5497 (1999). jap JAPIAU 0021-8979
- (1999) J. Appl. Phys. , vol.86 , pp. 5497
- Ramalingam, S.¹ Mahalingam, P.² Aydil, E.S.³ Maroudas, D.⁴

23
- 0000708311
- jaJAPIAU 0021-8979
- S. Ramalingam, D. Maroudas, and E. S. Aydil, J. Appl. Phys. 84, 3895 (1998). jap JAPIAU 0021-8979
- (1998) J. Appl. Phys. , vol.84 , pp. 3895
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

24
- 84861446178
- S. Ramalingam, S. Sriraman, E. S. Aydil, and D. Maroudas (unpublished)
- S. Ramalingam, S. Sriraman, E. S. Aydil, and D. Maroudas (unpublished).

25
- 84861428741
- Ph.D. thesis, University of California, Santa Barbara
- S. Ramalingam, Ph.D. thesis, University of California, Santa Barbara, 2000.
- (2000)
- Ramalingam, S.¹

26
- 21144474452
- jva JVTAD6 0734-2101
- D. Mataras, S. Cavadias, and D. Rapakoulias, J. Vac. Sci. Technol. A 11, 664 (1993). jva JVTAD6 0734-2101
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 664
- Mataras, D.¹ Cavadias, S.² Rapakoulias, D.³

27
- 0030246017
- jpd JPAPBE 0022-3727
- D. Mataras, F. Coutelieris, P. Kounavis, and D. E. Rapakoulias, J. Phys. D 29, 2452 (1996). jpd JPAPBE 0022-3727
- (1996) J. Phys. D , vol.29 , pp. 2452
- Mataras, D.¹ Coutelieris, F.² Kounavis, P.³ Rapakoulias, D.E.⁴

28
- 36549092854
- jaJAPIAU 0021-8979
- D. A. Doughty and A. Gallagher, J. Appl. Phys. 67, 139 (1990). jap JAPIAU 0021-8979
- (1990) J. Appl. Phys. , vol.67 , pp. 139
- Doughty, D.A.¹ Gallagher, A.²

29
- 0032205671
- sus SUSCAS 0039-6028
- S. Ramalingam, D. Maroudas, E. S. Aydil, and S. P. Walch, Surf. Sci. 418, L8 (1998). sus SUSCAS 0039-6028
- (1998) Surf. Sci. , vol.418 , pp. 8
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³ Walch, S.P.⁴

30
- 0000057124
- cph CHPLBC 0009-2614
- S. P. Walch, S. Ramalingam, E. S. Aydil, and D. Maroudas, Chem. Phys. Lett. 329, 304 (2000). cph CHPLBC 0009-2614
- (2000) Chem. Phys. Lett. , vol.329 , pp. 304
- Walch, S.P.¹ Ramalingam, S.² Aydil, E.S.³ Maroudas, D.⁴

31
- 0035971666
- apl APPLAB 0003-6951
- S. Ramalingam, S. Sriraman, E. S. Aydil, and D. Maroudas, Appl. Phys. Lett. 78, 2685 (2001). apl APPLAB 0003-6951
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2685
- Ramalingam, S.¹ Sriraman, S.² Aydil, E.S.³ Maroudas, D.⁴

32
- 0001435806
- jaJAPIAU 0021-8979
- D. A. Doughty, J. R. Doyle, G. H. Lin, and A. Gallagher, J. Appl. Phys. 67, 6220 (1990). jap JAPIAU 0021-8979
- (1990) J. Appl. Phys. , vol.67 , pp. 6220
- Doughty, D.A.¹ Doyle, J.R.² Lin, G.H.³ Gallagher, A.⁴

33
- 34250029692
- apl APPLAB 0003-6951
- J. C. Knights and R. A. Lujan, Appl. Phys. Lett. 35, 244 (1979). apl APPLAB 0003-6951
- (1979) Appl. Phys. Lett. , vol.35 , pp. 244
- Knights, J.C.¹ Lujan, R.A.²

34
- 0018434093
- jnc JNCSBJ 0022-3093
- J. C. Knights, G. Lucovsky, and R. J. Nemanich, J. Non-Cryst. Solids 32, 393 (1979). jnc JNCSBJ 0022-3093
- (1979) J. Non-Cryst. Solids , vol.32 , pp. 393
- Knights, J.C.¹ Lucovsky, G.² Nemanich, R.J.³

35
- 0000726819
- prl PRLTAO 0031-9007
- J. Tersoff, Phys. Rev. Lett. 56, 632 (1986). prl PRLTAO 0031-9007
- (1986) Phys. Rev. Lett. , vol.56 , pp. 632
- Tersoff, J.¹

36
- 7544236735
- prb PRBMDO 0163-1829
- J. Tersoff, Phys. Rev. B 38, 9902 (1988). prb PRBMDO 0163-1829
- (1988) Phys. Rev. B , vol.38 , pp. 9902
- Tersoff, J.¹

37
- 16444366630
- prb PRBMDO 0163-1829
- J. Tersoff, Phys. Rev. B 37, 6991 (1988). prb PRBMDO 0163-1829
- (1988) Phys. Rev. B , vol.37 , pp. 6991
- Tersoff, J.¹

38
- 27744577658
- prb PRBMDO 0163-1829
- J. Tersoff, Phys. Rev. B 39, 5566 (1989). prb PRBMDO 0163-1829
- (1989) Phys. Rev. B , vol.39 , pp. 5566
- Tersoff, J.¹

39
- 0001318638
- prb PRBMDO 0163-1829
- T. Ohira, O. Ukai, T. Adachi, Y. Takeuchi, and M. Murata, Phys. Rev. B 52, 8283 (1995). prb PRBMDO 0163-1829
- (1995) Phys. Rev. B , vol.52 , pp. 8283
- Ohira, T.¹ Ukai, O.² Adachi, T.³ Takeuchi, Y.⁴ Murata, M.⁵

40
- 0030316156
- mrs MRSPDH 0272-9172
- T. Ohira, O. Ukai, M. Noda, Y. Takeuchi, M. Murata, and H. Yoshida, Mater. Res. Soc. Symp. Proc. 408, 445 (1996). mrs MRSPDH 0272-9172
- (1996) Mater. Res. Soc. Symp. Proc. , vol.408 , pp. 445
- Ohira, T.¹ Ukai, O.² Noda, M.³ Takeuchi, Y.⁴ Murata, M.⁵ Yoshida, H.⁶

41
- 0035556449
- mrs MRSPDH 0272-9172
- E. S. Aydil, D. Maroudas, D. C. Marra, W. M. M. Kessels, S. Agarwal, S. Ramalingam, S. Sriraman, M. C. M. van de Sanden, and A. Takano, Mater. Res. Soc. Symp. Proc. 664, A1.1.1 (2001). mrs MRSPDH 0272-9172
- (2001) Mater. Res. Soc. Symp. Proc. , vol.664 , pp. 111
- Aydil, E.S.¹ Maroudas, D.² Marra, D.C.³ Kessels, W.M.M.⁴ Agarwal, S.⁵ Ramalingam, S.⁶ Sriraman, S.⁷ Van De Sanden, M.C.M.⁸ Takano, A.⁹

42
- 36549100403
- jcJCPSA6 0021-9606
- P. Ho, W. G. Breiland, and R. J. Buss, J. Chem. Phys. 91, 2627 (1989). jcp JCPSA6 0021-9606
- (1989) J. Chem. Phys. , vol.91 , pp. 2627
- Ho, P.¹ Breiland, W.G.² Buss, R.J.³

43
- 0000494853
- rsi RSINAK 0034-6748
- P. R. McCurdy, K. H. A. Bogart, N. F. Dalleska, and E. R. Fisher, Rev. Sci. Instrum. 68, 1684 (1997). rsi RSINAK 0034-6748
- (1997) Rev. Sci. Instrum. , vol.68 , pp. 1684
- McCurdy, P.R.¹ Bogart, K.H.A.² Dalleska, N.F.³ Fisher, E.R.⁴

44
- 0034227696
- sus SUSCAS 0039-6028
- S. Sriraman, S. Ramalingam, E. S. Aydil, and D. Maroudas, Surf. Sci. 459, L475 (2000). sus SUSCAS 0039-6028
- (2000) Surf. Sci. , vol.459 , pp. 475
- Sriraman, S.¹ Ramalingam, S.² Aydil, E.S.³ Maroudas, D.⁴

45
- 84861444891
- Ph.D. thesis, University of California, Santa Barbara
- D. C. Marra, Ph.D. thesis, University of California, Santa Barbara, 2000.
- (2000)
- Marra, D.C.¹

46
- 0000422466
- cph CHPLBC 0009-2614
- S. P. Walch, S. Ramalingam, S. Sriraman, E. S. Aydil, and D. Maroudas, Chem. Phys. Lett. 344, 249 (2001). cph CHPLBC 0009-2614
- (2001) Chem. Phys. Lett. , vol.344 , pp. 249
- Walch, S.P.¹ Ramalingam, S.² Sriraman, S.³ Aydil, E.S.⁴ Maroudas, D.⁵

47
- 0032359986
- jva JVTAD6 0734-2101
- D. C. Marra, E. A. Edelberg, R. L. Naone, and E. S. Aydil, J. Vac. Sci. Technol. A 16, 3199 (1998). jva JVTAD6 0734-2101
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3199
- Marra, D.C.¹ Edelberg, E.A.² Naone, R.L.³ Aydil, E.S.⁴

48
- 24544444978
- pes PESODO 0161-6374
- D. Maroudas, M. E. Barone, and B. Meng, Proc.-Electrochem. Soc. 96-4, 387 (1996). pes PESODO 0161-6374
- (1996) Proc.-Electrochem. Soc. , vol.964 , pp. 387
- Maroudas, D.¹ Barone, M.E.² Meng, B.³

49
- 0005964182
- prb PRBMDO 0163-1829
- N. Mousseau and L. J. Lewis, Phys. Rev. B 43, 9810 (1991). prb PRBMDO 0163-1829
- (1991) Phys. Rev. B , vol.43 , pp. 9810
- Mousseau, N.¹ Lewis, L.J.²

50
- 0019539137
- pmb PMABDJ 0141-8637
- W. Schulke, Philos. Mag. B 43, 451 (1981). pmb PMABDJ 0141-8637
- (1981) Philos. Mag. B , vol.43 , pp. 451
- Schulke, W.¹

51
- 0024301219
- phb PHYBE3 0921-4526
- R. Bellisent, A. Menelle, W. S. Howells, A. C. Wright, T. M. Brunier, R. N. Sinclair, and F. Jansen, Physica B 156-157, 217 (1989). phb PHYBE3 0921-4526
- (1989) Physica B , vol.156-157 , pp. 217
- Bellisent, R.¹ Menelle, A.² Howells, W.S.³ Wright, A.C.⁴ Brunier, T.M.⁵ Sinclair, R.N.⁶ Jansen, F.⁷

52
- 0036478149
- tps ITPSBD 0093-3813
- S. Sriraman, E. S. Aydil, and D. Maroudas, IEEE Trans. Plasma Sci. 30, 112 (2002). tps ITPSBD 0093-3813
- (2002) IEEE Trans. Plasma Sci. , vol.30 , pp. 112
- Sriraman, S.¹ Aydil, E.S.² Maroudas, D.³

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