Dilution-enhanced radical generation in silane glow discharges

Journal of Physics D: Applied Physics

Volumn 29, Issue 9, 1996, Pages 2452-2458

  Mataras, D ^a   Coutelieris, F ^a   Kounavis, P ^a   Rapakoulias, D E ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ARGON; COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); FLUORESCENCE; HELIUM; HYDROGEN; LASER BEAM EFFECTS; MONTE CARLO METHODS; PROBABILITY; SILANES;

DILUTION ENHANCED RADICAL GENERATION;

GLOW DISCHARGES;

EID: 0030246017     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/9/033     Document Type: Article

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