Nanoscale scratch resistance of ultrathin protective overcoats on hard magnetic disks

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1741-1744

  Anoikin, E V ^a   Yang, M M ^a   Chao, J L ^a   Elings, J R ^b   Brown, D W ^c  

^a WESTERN DIGITAL CORPORATION   (United States)

^b Digital Instruments   (United States)

^c Diamonex   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON (A-C); AMORPHOUS HYDROGENATED CARBON (A-C:H) FILMS; ATOMIC FORCE MICROSCOPES; BONDING CHARACTER; CARBON OVERCOAT; DC MAGNETRON SPUTTERING; ION BEAM DEPOSITION; MAGNETIC DISK; NANO SCALE; NANO-SCRATCH; SCRATCH RESISTANCE; SCRATCH TESTING; SCRATCH-RESISTANT; SPUTTERING PROCESS; SUBSTRATE TEMPERATURE; TESTING TECHNIQUE; ULTRA-THIN;

AMORPHOUS FILMS; CHEMICAL MODIFICATION; DISKS (MACHINE COMPONENTS); DISKS (STRUCTURAL COMPONENTS); NANOSTRUCTURED MATERIALS; NONVOLATILE STORAGE; RAMAN SPECTROSCOPY; TESTING;

AMORPHOUS CARBON;

EID: 0003912452     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581294     Document Type: Article

References (8)

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