Testing ultra-thin films by laser-acoustics

Surface and Coatings Technology

Volumn 126, Issue 2-3, 2000, Pages 136-141

  Schneider, D ^a   Witke, T ^a   Schwarz, T ^a   Schooneich B ^a   Schultrich, B ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Diamond like carbon; Laser acoustics; Raman spectroscopy; Surface acoustic waves; Young's modulus

Indexed keywords

ACOUSTIC WAVES; CARBON; DEPOSITION; ELASTIC MODULI; LASER APPLICATIONS; NONDESTRUCTIVE EXAMINATION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SILICON; SURFACE WAVES; ULTRATHIN FILMS; WEAR OF MATERIALS;

DIAMOND-LIKE CARBON FILMS; LASER-ACOUSTIC TECHNIQUE;

AMORPHOUS FILMS;

EID: 0033893956     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00672-6     Document Type: Article

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