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Volumn 9, Issue 3, 2000, Pages 843-846
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Mechanism of destruction of a-C:H films under the action of aggressive liquids
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
BINDING ENERGY;
CARBON DIOXIDE;
INTERFACES (MATERIALS);
MASS SPECTROMETRY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON;
SINGLE CRYSTALS;
DIAMOND-LIKE CARBON (DLC) FILMS;
THERMODESORPTION;
AMORPHOUS FILMS;
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EID: 0033746985
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(99)00290-3 Document Type: Article |
Times cited : (4)
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References (8)
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