A systematic study of a-cnx overcoat film for proximity recording

IEEE Transactions on Magnetics

Volumn 33, Issue 5 PART 1, 1997, Pages 3109-3111

  Zhang, Bing ^a  

^a MaxMedia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY MEASUREMENT; FILM GROWTH; MAGNETIC RECORDING; MAGNETRON SPUTTERING; NITRIDES; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE;

AMORPHOUS FILMS;

EID: 0031221546     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.617860     Document Type: Article

References (7)

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3. W. T. Zheng, H, Sjostrom, I. Ivanov, K. Z. Xing, E. Brotiman, W. R. Salaneck, J. E. Grene, J. E. Sundgren, "Reactive Magnetron Sputter Deposited CN,: Effects of N2 Pressure and Growth Temperature on Film Composition, Bonding, and Microstructure", J. Vac. Sei. Technol. A Vol. 14(5), pp. 2696-2701, 1996.
4. A. R. Machcha, T. C. McMilian, F. E. Talke, "The Tribology of Tri-Pad Sliders with Hydrogenated and Nitrogenated Disks", IEEE Trans. Mag. Vol. 32, pp. 3654-3656,1996.
5. E. C. Cutiongca, D. Li, Y. W. Chung, and C. S. Bhatia, "Tribological Behavior of Amorphous Carbon Nitride Overcoats for Magnetic Thin-film Rigid Disks", Journal of Tribology, Vol. 118, pp 543-548,1996.
6. R. Hauert, A. Glisenti, S. Metin, J. Goitia, J. H. Kauftnan, et al. , "Influence of Nitrogen Doping on Different Properties of a-C:H", Thin Solid Films, Vol. 268, pp22-29, 1995.
7. x/TiN Coatings Prepared by Single-Cathode Magnetron Sputtering", Surface and Coatings Technology, in press.