Non-destructive characterization of mechanical and structural properties of amorphous diamond-like carbon films

Diamond and Related Materials

Volumn 7, Issue 7, 1998, Pages 973-980

  Schneider, D ^a   Meyer, C F ^a   Mai, H ^a   Schoneich B ^a   Ziegele, H ^a   Scheibe, H J ^a   Lifshitz, Y ^b  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b SOREQ NUCLEAR RESEARCH CENTER   (Israel)

Author keywords

Diamond like carbon; Ellipsometry; Raman spectroscopy; Young's modulus

Indexed keywords

AMORPHOUS FILMS; CARBON; ELASTIC MODULI; ELLIPSOMETRY; ION BEAMS; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY;

AMORPHOUS DIAMOND FILMS; DIAMOND-LIKE FILMS;

DIAMOND FILMS;

EID: 0032117257     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00337-3     Document Type: Article

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