Adhesion assessment of silicon carbide, carbon, and carbon nitride ultrathin overcoats by nanoscratch techniques

Journal of Applied Physics

Volumn 81, Issue 8 PART 2B, 1997, Pages 5396-5398

  Deng, Hong ^a   Scharf, Thomas W ^a   Barnard, John A ^a  

^a University of Alabama   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000302094     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364551     Document Type: Article

References (3)

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2. T. Y. Tsui, G. M. Pharr, W. C. Oliver, Y. W. Chung, E. C. Custonco, C. S. Bhatia, R. L. White, R. L. Rhoades, and S. M. Gorbakin, Mater. Res. Soc. Symp. Proc. 356, 767 (1995).
3. B. Bhushan, B. K. Gupta, and M. H. Azarian, Wear 181, 734 (1995).