Nitride-based ultraviolet metal-semiconductor-metal photodetectors with a low-temperature GaN layer

Journal of Electronic Materials

Volumn 32, Issue 5, 2003, Pages 400-402

  Sheu, J K ^a   Kao, C J ^a   Lee, M L ^b   Lai, W C ^b   Yeh, L S ^a   Chi, G C ^a   Chang, S J ^b   Su, Y K ^b   Tsai, J M ^c  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c South Epitaxy Corporation   (Taiwan)

Author keywords

Dark current; LT GaN; MSM; UV photodetector

Indexed keywords

FIELD EFFECT TRANSISTORS; PHOTOCURRENTS; SCHOTTKY BARRIER DIODES; SEMICONDUCTING GALLIUM COMPOUNDS;

DARK CURRENTS;

PHOTODETECTORS;

EID: 0038664235     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0165-4     Document Type: Conference Paper

References (32)

1. J.I. Pankove, Mater. Res. Soc. Symp. Proc. 162, 515 (1990).
2. E. Monroy, E. Muñoz, F.J. Sánchez, F. Calle, E. Calleja, B. Beaumout, P. Gibart, J.A. Muñoz, and F. Cussó, Semicond. Sci. Technol. 13, 1042 (1998).
3. G. Parish, S. Keller, P. Kozodoy, J.A. Ibbetson, H. Marchand, P.T. Fini, S.B. Fleischer, S.P. DenBaars, and U.K. Mishra, Appl. Phys. Lett. 75, 247 (1999).
4. E. Monroy, M. Hamilton, D. Walker, P. Kung, F.J. Sánchez, and M. Razeghi, Appl. Phys. Lett. 74, 1171 (1999).
5. A. Osinsky, S. Gangopadhyay, R. Gaska, B. Williams, M.A. Khan, D. Kuksenkov, and H. Temkin, Appl. Phys. Lett. 71, 2334 (1997).
6. Q. Chen, J.W. Yang, A. Osinsky, S. Gangopadhyay, B. Lim, M.Z. Anwar, M. Asif Khan, D. Kuksenkov, and H. Temkin, Appl. Phys. Lett. 70, 2277 (1997).
7. Z.C. Huang, J.C. Chen, and D. Wickenden, J. Cryst. Growth 170, 362 (1997).
8. C.H. Chen, S.J. Chang, Y.K. Su, G.C. Chi, J.Y. Chi, C.A. Chang, J.K. Sheu, and J.F. Chen, IEEE Photon. Technol. Lett. 13, 848 (2001).
9. D. Walker, E. Monroy, P. Kung, J. Wu, M. Hamilton, F.J. Sanchez, J. Diaz, and M. Razeghi, Appl. Phys. Lett. 74, 762 (1999) and references therein.
10. L.W. Yin, Y. Hwang, J.H. Lee, R.M. Kolabas, R.J. Trew, and U.K. Mishra, IEEE Electron Dev. Lett. 11, 561 (1990).
11. T.C. Wen, S.J. Chang, L.W. Wu, Y.K. Su, W.C. Lai, C.H. Kuo, C.H. Chen, J.K. Sheu, and J.F. Chen, IEEE Tran. Electron. Dev. 49, 1093 (2002).
12. L.W. Wu, S.J. Chang, T.C. Wen, Y.K. Su, W.C. Lai, C.H. Kuo, C.H. Chen, and J.K. Sheu, IEEE J. Quant. Electron. 38, 446 (2002).
13. C.H. Kuo, S.J. Chang, Y.K. Su, J.F. Chen, L.W. Wu, J.K. Sheu, C.H. Chen, and G.C. Chi, IEEE Electron Dev. Lett. 23, 240 (2002).
14. C.H. Ko, Y.K. Su, S.J. Chang, T.M. Kuan, C.I. Chiang, W.H. Lan, W.J. Lin, and J. Webb, Jpn. J. Appl. Phys. 41, 2489 (2002).
15. J.K. Sheu, J.M. Tsai, S.C. Shei, W.C. Lai, T.C. Wen, C.H. Kou, Y.K. Su, S.J. Chang, and G.C. Chi, IEEE Electron Dev. Lett. 22, 460 (2001).
16. C.H. Kuo, S.J. Chang, Y.K. Su, L.W. Wu, J.K. Sheu, C.H. Chen, and G.C. Chi, Jpn. J. Appl. Phys. Lett. 41, L112 (2002).
17. S.J. Chang, Y.K. Su, T.L. Tsai, C.Y. Chang, C.L. Chiang, C.S. Chang, T.P. Chen, and K.H. Huang, Appl. Phys. Lett. 78, 312 (2001).
18. W.C. Lai, M. Yokoyama, S.J. Chang, J.D. Guo, C.H. Sheu, T.Y. Chen, W.C. Tsai, J.S. Tsang, S.H. Chang, and S.M. Sze, Jpn. J. Appl. Phys. Lett. 39, L1138 (2000).
19. Y.Z. Chiou, Y.K. Su, S.J. Chang, J.F. Chen, C.S. Chang, S.H. Liu, I.C. Lin, and C.H. Chen, Jpn. J. Appl. Phys. 41, 3643 (2002).
20. J.K. Sheu, C.J. Pan, G.C. Chi, C.H. Kuo, L.W. Wu, C.H. Chen, S.J. Chang, and Y.K. Su, IEEE Photon. Technol. Lett. 14, 450 (2002).
21. S.J. Chang, W.C. Lai, Y.K. Su, J.F. Chen, C.H. Liu, and U.H. Liaw, IEEE J. Sel. Top. Quant. Electron. 8, 278 (2002).
22. C.H. Chen, S.J. Chang, Y.K. Su, G.C. Chi, J.K. Sheu, and J.F. Chen, IEEE J. Sel. Top. Quant. Electron. 8, 284 (2002).
23. C.H. Chen, Y.K. Su, S.J. Chang, G.C. Chi, J.K. Sheu, J.F. Chen, C.H. Liu, and U.H. Liaw, IEEE Electron Dev. Lett. 23, 130 (2002).
24. C.H. Ko, S.J. Chang, Y.K. Su, W.H. Lan, J.F. Chen, T.M. Kuan, Y.C. Huang, C.I. Chiang, J. Webb, and W.J. Lin, Jpn. J. Appl. Phys. Lett. 41, L226 (2002).
25. J.K. Sheu, C.J. Tun, M.S. Tsai, C.C. Lee, G.C. Chi, S.J. Chang, and Y.K. Su, J. Appl. Phys. 91, 1845 (2002).
26. W.C. Lai, S.J. Chang, M. Yokoyama, J.K. Sheu, and J.F. Chen, IEEE Photon. Technol. Lett. 13, 559 (2001).
27. Y.K. Su, Y.Z. Chiou, F.S. Juang, S.J. Chang, and J.K. Sheu, Jpn. J. Appl. Phys. 40, 2996 (2001).
28. C.H. Chen, S.J. Chang, Y.K. Su, G.C. Chi, J.K. Sheu, and I.C. Lin, Jpn. J. Appl. Phys. 40, 2762 (2001).
29. K.S. Ramaiah, Y.K. Su, S.J. Chang, F.S. Juang, and C.H. Chen, J. Cryst. Growth 220, 405 (2000).
30. I. Ferguson, C.A. Tran, R.F. Karlicek, Jr., Z.C. Feng, R. Stall, S. Liang, Y. Lu, and C. Joseph, Mater. Sci. Eng. B 50, 311 (1997).
31. L.W. Yin, J.P. Ibbetson, M.M. Hashemi, A.C. Gossard, U.K. Mishra, Y. Hwang, T. Zhang, and R.M. Kolbas, Appl. Phys. Lett. 60, 2005 (1992) and references therein.
32. J.K. Sheu, M.L. Lee, W.C. Lai, W.H. Chang, C.J. Kao, M.G. Chen, S.J. Chang, Y.K. Su, J.M. Tsai, and G.C. Chi, accepted to be published in Appl. Phys. Lett.