Superhard materials in the B/C/N system and modern micro system technology: Synergistic effects

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 237-244

  Kassing, Rainer ^a   Oesterschulze, Egbert ^a   Kulisch, Wilhelm ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Diamond like material; Nano systems; Scanning probe microscopies

Indexed keywords

AMORPHOUS MATERIALS; ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; BORON COMPOUNDS; DIAMONDS; SENSORS; THIN FILMS;

SUPERHARD MATERIALS;

COATINGS;

COATING; DIAMOND-LIKE CARBON; HARDNESS; SURFACE TREATMENT;

EID: 0038347343     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00172-5     Document Type: Article

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