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Applied Physics A: Materials Science and Processing

Volumn 66, Issue SUPPL. 1, 1998, Pages

Fabrication of monolithic diamond probes for scanning probe microscopy applications

(6) Mihalcea, C a Scholz, W a Malave A a Albert, D a Kulisch, W a Oesterschulze, E a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT MODES; DIAMOND THIN FILM; DIAMOND TIP; SILICON CANTILEVER; SILICON MICROTECHNOLOGY; SILICON SUBSTRATES; STANDARD METHOD; TIP WEAR;

ATOMIC FORCE MICROSCOPY; DEPOSITION; MECHANICAL PROPERTIES; NANOCANTILEVERS; PROBES; THIN FILMS;

DIAMONDS;

EID: 0002824156 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s003390051106 Document Type: Article

Times cited : (19)

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