Optical active gallium arsenide probes for scanning probe microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3467, Issue , 1998, Pages 305-312

  Heisig, S ^a   Steffens, W ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

GaAs cantilever; GaAs probes for SPM; Microelectromechanical system (MEMS); Microfabrication of miniaturized SPM probes; Scanning near field optical microscopy (SNOM); Scanning probe microscopy (SPM); Spray etching; Ultrafast scanning probe microscopy (USPM); Vertical cavity surface emitting laser diode (VCSEL)

Indexed keywords

ENERGY GAP; ETCHING; LASER BEAMS; LIGHT SOURCES; MICROELECTROMECHANICAL DEVICES; PHOTODIODES; PROBES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR LASERS; ULTRASHORT PULSES;

POSITION SENSITIVE PHOTODIODE; SCANNING NEAR-FIELD PROBE MICROSCOPY; SPRAY ETCHING; ULTRAFAST SCANNING PROBE MICROSCOPY; VERTICAL CAVITY SURFACE EMITTING LASER;

OPTICAL MICROSCOPY;

EID: 0037879043     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326832     Document Type: Conference Paper

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