Micromachined probes for high frequency scanning force microscopy and scanning thermal microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 92-100

  Stopka, Michael ^a   Münster, Stefan ^a   Leinhos, T ^a   Mihalcea, Christopher ^a   Scholz, Wenzel ^a   Leyk, A ^b   Mertin, W ^b   Oesterschulze, Egbert ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Coplanar wave guide probe; Electrical and thermal IC testing; High frequency scanning force microscopy; Micromachined probes; Monolithic microwave integrated circuits; Scanning thermal microscopy; Schottky diode probe

Indexed keywords

BATCH DATA PROCESSING; COMPOSITE MICROMECHANICS; DIODES; ELECTRIC CONDUCTORS; ELECTRIC NETWORK ANALYSIS; ELECTRIC PROPERTIES; FABRICATION; GYRATORS; INTEGRATED CIRCUITS; MACHINING; MICROMACHINING; MICROWAVE CIRCUITS; MICROWAVE INTEGRATED CIRCUITS; MICROWAVES; MONOLITHIC INTEGRATED CIRCUITS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PROBES; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON COMPOUNDS;

COPLANAR WAVE GUIDE PROBE; ELECTRICAL AND THERMAL IC TESTING; HIGH FREQUENCY SCANNING FORCE MICROSCOPY; MICROMACHINED PROBES; SCANNING THERMAL MICROSCOPY; SCHOTTKY DIODE PROBE;

SCANNING;

EID: 0012579468     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271217     Document Type: Conference Paper

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