Voltage contrast in submicron integrated circuits by scanning force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 842-844

  Böhm, Christoph ^a   Sprengepiel, Jörg ^a   Otterbeck, Markus ^a   Kubalek, Erich ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343713362     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588726     Document Type: Article

References (16)

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