Fabrication and characterization of 100-nm-thick GaAs cantilevers

Review of Scientific Instruments

Volumn 67, Issue 10, 1996, Pages 3591-3593

  Harris, J G E ^a   Awschalom, D D ^a   Maranowski, K D ^b   Gossard, A C ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001255981     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147250     Document Type: Article

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