|
|
Volumn 66, Issue SUPPL. 1, 1998, Pages
|
|
Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
CONTACT AREAS;
ELECTRICAL FORCE;
HIGH FREQUENCY HF;
I - V CURVE;
MICROMACHINED;
MODERN APPLICATIONS;
OPTICAL AND ELECTRICAL PROPERTIES;
OPTICAL APERTURE;
PHYSICAL QUANTITIES;
PROBE TIPS;
SCANNING FORCE MICROSCOPY;
SCANNING NEAR-FIELD OPTICAL MICROSCOPY;
SCANNING THERMAL MICROSCOPY;
SCHOTTKY DIODES;
SI SCHOTTKY DIODE;
SIMULTANEOUS MEASUREMENT;
TOPOGRAPHY IMAGING;
DIODES;
ELECTRIC PROPERTIES;
FABRICATION;
OPTICAL PROPERTIES;
PROBES;
SCANNING;
SCANNING PROBE MICROSCOPY;
SCANNING TUNNELING MICROSCOPY;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
SURFACE CHEMISTRY;
SURFACE TOPOGRAPHY;
TITANIUM;
TITANIUM COMPOUNDS;
NEAR FIELD SCANNING OPTICAL MICROSCOPY;
|
|
EID: 67649972063
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s003390051101 Document Type: Article |
|
Times cited : (50)
|
|
References (16)
|
