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Volumn 71, Issue 1-4, 1998, Pages 99-105
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Monolithic gallium arsenide cantilever for scanning near-field microscopy
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Author keywords
Atomic force microscopy; Microwave technology; Near field scanning optical microscopy; Scanning probe microscopes
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Indexed keywords
ASPECT RATIO;
ATOMIC FORCE MICROSCOPY;
CRYSTAL MICROSTRUCTURE;
ETCHING;
MECHANICAL PROPERTIES;
MICROWAVES;
OPTICAL MICROSCOPY;
PHYSICAL PROPERTIES;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING SILICON;
TECHNOLOGY;
HIGH FREQUENCY SCANNING ELECTRON FORCE MICROSCOPY;
MICROWAVE TECHNOLOGY;
MONOLITHIC CANTILEVER;
NEAR FIELD SCANNING OPTICAL MICROSCOPY;
SCANNING PROBE MICROSCOPE;
OPTICAL FIBERS;
GALLIUM ARSENIDE;
SILICON;
ARTICLE;
DIELECTRIC CONSTANT;
SCANNING ELECTRON MICROSCOPY;
SCANNING NEAR FIELD OPTICAL MICROSCOPY;
SEMICONDUCTOR;
SENSOR;
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EID: 0032033799
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/S0304-3991(97)00118-6 Document Type: Article |
Times cited : (29)
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References (10)
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