Micromachined aperture probe tip for multifunctional scanning probe microscopy

Ultramicroscopy

Volumn 71, Issue 1-4, 1998, Pages 93-98

  Abraham, Michael ^a   Ehrfeld, W ^a   Lacher, Manfred ^a   Mayr, Karsten ^a   Wilfried Noell, ^a   Güthner, Peter ^b   Barenz, J ^c  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b Omicron Vakuumphysik GmbH   (Germany)

^c UNIVERSITY OF ULM   (Germany)

Author keywords

Atomic force microscopy; Integrated optics; Integrated probes; Micromachining; Near field optical microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTEGRATED OPTICS; INTEGRATED OPTOELECTRONICS; MICROMACHINING; OPTICAL FIBERS; OPTICAL MICROSCOPY; OPTICAL VARIABLES MEASUREMENT; PERFORMANCE; WAVEGUIDES;

MICROMACHINED APERTURE PROBE TIP; NEAR FIELD APERTURE TIP; NEAR FIELD OPTICAL MICROSCOPY; REPRODUCIBILITY; SCANNING PROBE MICROSCOPY SENSOR;

OPTICAL SENSORS;

ARTICLE; ATOMIC FORCE MICROSCOPY; FIBEROSCOPE; OPTICS; PERFORMANCE; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SENSOR;

EID: 0032033813     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00114-9     Document Type: Article

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