New optical probes using InP-based cantilevers

Ultramicroscopy

Volumn 71, Issue 1-4, 1998, Pages 81-84

  Castagne, M ^a   Belier, B ^a   Gall, P ^a   Benfedda, M ^a   Seassal, C ^b   Spisser, A ^b   Leclerc, J L ^b   Viktorovich, P ^b  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b ECOLE CENTRALE DE LYON   (France)

Author keywords

Cantilevers; Integrated photodetector; Microfabrication; Near field optics

Indexed keywords

EPITAXIAL GROWTH; ETCHING; INTEGRATED OPTOELECTRONICS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; PHOTODETECTORS; SEMICONDUCTING INDIUM PHOSPHIDE;

CANTILEVER; INTEGRATED PHOTODETECTOR; MICROFABRICATION; NEAR FIELD OPTICS; OPTICAL PROBES; SPRING CONSTANT; WET ETCHING;

PROBES;

ARTICLE; ATOMIC FORCE MICROSCOPY; DEVICE; ELECTRONICS; LIGHT; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SENSOR; SIGNAL DETECTION;

EID: 0032033838     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00113-7     Document Type: Article

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