Scanning near-field optical microscope using an atomic force microscope cantilever with integrated photodiode

Applied Physics Letters

Volumn 68, Issue 5, 1996, Pages 579-581

  Akamine, S ^a   Kuwano, H ^a   Yamada, H ^b  

^a NTT CORPORATION   (Japan)

^b NATL INST FOR ADV INTERDISC RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; FABRICATION; OPTICAL MICROSCOPY; OXIDATION; PHOTODIODES; POLYCARBONATES; PRISMS; SILICON WAFERS; SINGLE CRYSTALS;

ATOMIC FORCE MICROSCOPE; EVANESCENT OPTICAL FIELDS; FORCE SENSING CANTILEVER; MICROFABRICATION; SCANNING NEAR FIELD OPTICAL MICROSCOPE;

MICROSCOPES;

EID: 0029734819     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116504     Document Type: Article

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