Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor

IEEE Transactions on Electron Devices

Volumn 50, Issue 3, 2003, Pages 730-739

  Chen, Jinghong ^a   Zou, Jun ^b   Liu, Chang ^b   Schutt Ainé, José E ^b   Kang, Sung Mo Steve ^c  

^a AGERE SYSTEMS   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c University of California Santa Cruz   (United States)

Author keywords

Electrostatic actuation; Magnetic actuation; Microelectromechanical systems (MEMS); Modeling and simulation; Monolithic inductor; Quality factor; RFIC; Self resonance; Varactor; Variable capacitor

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRIC COILS; ELECTRIC INDUCTORS; ELECTROSTATICS; MICROELECTRONIC PROCESSING; PLASTIC DEFORMATION; SCATTERING PARAMETERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS;

ELECTROSTATIC ACTUATION; MAGNETIC ACTUATION; MICROELECTROMECHANICAL SYSTEM TECHNOLOGY; MONOLITHIC INDUCTOR; SPIRAL CONDUCTOR;

CAPACITORS;

EID: 0037560897     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.810479     Document Type: Article

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