Micromachined electro-mechanically tunable capacitors and their applications to rf 1c's

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 12 PART 2, 1998, Pages 2587-2596

  Dec, Aleksander ^a   Suyama, Ken ^b  

^a Department of Earth and Environmental Sciences   (United States)

^b Epoch Technologies   (United States)

Author keywords

Varactors; Voltage controlled oscillators

Indexed keywords

CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; GRAVITATIONAL EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON; THERMAL EFFECTS; TUNING; VARIABLE FREQUENCY OSCILLATORS;

INTEGRATED INDUCTORS; TUNABLE CAPACITORS;

VARACTORS;

EID: 0032296249     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.739251     Document Type: Article

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