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Volumn 1, Issue , 1995, Pages 489-499
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Micromechanical resonators for oscillators and filters
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Author keywords
[No Author keywords available]
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Indexed keywords
BANDPASS FILTERS;
CMOS INTEGRATED CIRCUITS;
ELECTRIC FILTERS;
ELECTRIC NETWORK SYNTHESIS;
MATHEMATICAL MODELS;
MICROMACHINING;
MONOLITHIC INTEGRATED CIRCUITS;
NATURAL FREQUENCIES;
OSCILLATORS (ELECTRONIC);
PERFORMANCE;
SILICON COMPOUNDS;
STABILITY;
BROWNIAN MOTION;
CIRCUIT MODELING;
MASS LOADING;
MICROMECHANICAL RESONATORS;
MONOLITHIC OSCILLATOR;
POLYSILICON;
ACOUSTIC RESONATORS;
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EID: 0029459298
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (121)
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References (33)
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