High Q backside micromachined CMOS inductors

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 2, Issue , 1999, Pages

  Ozgur, Mehmet ^a   Zaghloul, Mona E ^a   Gaitan, Michael ^a  

^a GEORGE WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; MASKS; MICROMACHINING; SCHEMATIC DIAGRAMS; SUBSTRATES;

CMOS INDUCTORS; QUALITY FACTOR;

CMOS INTEGRATED CIRCUITS;

EID: 0032715814     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)