Microwave inductors and capacitors in standard multilevel interconnect silicon technology

IEEE Transactions on Microwave Theory and Techniques

Volumn 44, Issue 1, 1996, Pages 100-104

  Burghartz, Joachim N ^a   Soyuer, Mehmet ^a   Jenkins, Keith A ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; ELECTRIC WIRING; INTEGRATED CIRCUIT MANUFACTURE; LUMPED PARAMETER NETWORKS; MATHEMATICAL MODELS; OPTIMIZATION; SEMICONDUCTING SILICON; SUBSTRATES;

BICMOS TECHNOLOGY; INTERCONNECT METAL LAYERS; LUMPED ELEMENT MODELS; METAL TO METAL CAPACITORS; SPIRAL INDUCTORS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0029774940     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.481391     Document Type: Article

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