On-chip 3D air core micro-inductor for high-frequency applications using deformation of sacrificial polymer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4334, Issue , 2001, Pages 54-62

  Chomnawang, N ^a   Lee, J B ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Air core; High Q; Inductor; MEMS; On chip; Polymer; RF; Wireless

Indexed keywords

ASPECT RATIO; DEFORMATION; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PLASTIC MOLDS; Q FACTOR MEASUREMENT; SOLENOIDS;

MICRO-INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0035151841     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436627     Document Type: Conference Paper

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