High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

IEEE MTT-S International Microwave Symposium Digest

Volumn 4, Issue , 1999, Pages 1523-1526

  Yoon, Jun Bo ^a   Han, Chul Hi ^a   Yoon, Euisik ^a   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROPLATING; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PHOTORESISTS; Q FACTOR MEASUREMENT; THREE DIMENSIONAL;

ON CHIP INDUCTORS; PEAK Q FREQUENCY; Q FACTOR;

ELECTRIC INDUCTORS;

EID: 0033365516     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)