Development of a wide-tuning-range two-parallel-plate tunable capacitor for integrated wireless communication systems

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 11, Issue 5, 2001, Pages 322-329

  Zou, Jun ^a   Liu, Chang ^a   Schutt Ainé, José E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

MEMS; Tunable capacitor; Varactor; Wireless communication

Indexed keywords

ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; TUNING; WIRELESS TELECOMMUNICATION SYSTEMS;

TUNABLE CAPACITORS;

VARACTORS;

EID: 0035449331     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.1040     Document Type: Article

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