메뉴 건너뛰기




Volumn 49, Issue 12, 2002, Pages 2222-2229

Multiple-gate SOI MOSFETs: Device design guidelines

Author keywords

Insulated gate FETs; MOS devices; Semiconductor device modeling; Silicon on insulator technology

Indexed keywords

COMPUTER SIMULATION; ELECTRIC PROPERTIES; ELECTRODES; GATES (TRANSISTOR); SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SILICON ON INSULATOR TECHNOLOGY;

EID: 0036999661     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2002.805634     Document Type: Article
Times cited : (454)

References (31)
  • 5
    • 0033338764 scopus 로고    scopus 로고
    • Buried oxide fringing capacitance: A new physical model and its implication on SOI device scaling and architecture
    • T. Ernst and S. Cristoloveanu, "Buried oxide fringing capacitance: A new physical model and its implication on SOI device scaling and architecture," in Proc. IEEE Int. SOI Conf., 1999, pp. 38-39.
    • Proc. IEEE Int. SOI Conf., 1999 , pp. 38-39
    • Ernst, T.1    Cristoloveanu, S.2
  • 10
    • 0024918341 scopus 로고
    • A fully depleted lean-channel transist or (DELTA)-a novel vertical ultra thin SOI MOSFET
    • D. Hisamoto, T. Kaga, Y. Kawamoto, and E. Takeda, "A fully depleted lean-channel transist or (DELTA)-a novel vertical ultra thin SOI MOSFET," in IEDM Tech. Dig., 1989, pp. 833-836.
    • (1989) IEDM Tech. Dig. , pp. 833-836
    • Hisamoto, D.1    Kaga, T.2    Kawamoto, Y.3    Takeda, E.4
  • 11
    • 0032205525 scopus 로고    scopus 로고
    • A simple model for threshold voltage of surrounding-gate MOSFET's
    • Nov.
    • C. P. Auth and J. D. Plummer, "A simple model for threshold voltage of surrounding-gate MOSFET's," IEEE Trans. Electron Devices, vol. 45, pp. 2381-2383, Nov. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 2381-2383
    • Auth, C.P.1    Plummer, J.D.2
  • 13
    • 84886447996 scopus 로고    scopus 로고
    • Self-align (top and bottom) double-gate MOSFET with a 25 nm thick silicon channel
    • H.-S. P. Wong, K. K. Chan, and Y. Taur, "Self-align (top and bottom) double-gate MOSFET with a 25 nm thick silicon channel," in IEDM Tech. Dig., 1997, pp. 427-430.
    • (1997) IEDM Tech. Dig. , pp. 427-430
    • Wong, H.-S.P.1    Chan, K.K.2    Taur, Y.3
  • 14
    • 0030283640 scopus 로고    scopus 로고
    • Fully depleted dual-gated thin-film SOI P-MOSFET's fabricated in SOI islands with an isolated buried polysilicon back gate
    • Nov.
    • J. P. Denton and G. W. Neudeck, "Fully depleted dual-gated thin-film SOI P-MOSFET's fabricated in SOI islands with an isolated buried polysilicon back gate," IEEE Electron Device Lett., vol. 17, pp. 509-511, Nov. 1996.
    • (1996) IEEE Electron Device Lett. , vol.17 , pp. 509-511
    • Denton, J.P.1    Neudeck, G.W.2
  • 15
    • 0028499440 scopus 로고
    • Deep-sub-micrometer channel design in silicon-on-insulator (SOI) MOSFET's
    • Sept.
    • L. T. Su, J. B. Jacobs, J. E. Chung, and D. A. Antoniadis, "Deep-sub-micrometer channel design in silicon-on-insulator (SOI) MOSFET's," IEEE Electron Device Lett., vol. 15, pp. 366-369, Sept. 1994.
    • (1994) IEEE Electron Device Lett. , vol.15 , pp. 366-369
    • Su, L.T.1    Jacobs, J.B.2    Chung, J.E.3    Antoniadis, D.A.4
  • 16
    • 0035714801 scopus 로고    scopus 로고
    • FD/DG-SOI MOSFET -a viable approach to overcoming the device scaling limit
    • D. Hisamoto, "FD/DG-SOI MOSFET -a viable approach to overcoming the device scaling limit," in IEDM Tech. Dig., 2001, pp. 429-433.
    • (2001) IEDM Tech. Dig. , pp. 429-433
    • Hisamoto, D.1
  • 17
    • 84907697667 scopus 로고    scopus 로고
    • SOI technology outlook for sub-0.25 μm CMOS: Challenges and opportunities
    • B. Davari and G. Shahidi, "SOI technology outlook for sub-0.25 μm CMOS: Challenges and opportunities," in Proc. ESSDERC, 1993, pp. 669-674.
    • Proc. ESSDERC, 1993 , pp. 669-674
    • Davari, B.1    Shahidi, G.2
  • 18
    • 0033884178 scopus 로고    scopus 로고
    • The behavior of narrow-width SOI MOSFET's with MESA isolation
    • Mar.
    • H. Wang, M. Chan, Y. Wang, and P. K. Ko, "The behavior of narrow-width SOI MOSFET's with MESA isolation," IEEE Trans. Electron Devices, vol. 47, pp. 593-600, Mar. 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , pp. 593-600
    • Wang, H.1    Chan, M.2    Wang, Y.3    Ko, P.K.4
  • 20
    • 0022754389 scopus 로고
    • The inverse-narrow width effect
    • L. A. Akers, "The inverse-narrow width effect," IEEE Electron Device Lett., vol. EDL-7, pp. 419-421, 1986.
    • (1986) IEEE Electron Device Lett. , vol.EDL-7 , pp. 419-421
    • Akers, L.A.1
  • 23
    • 0035718380 scopus 로고    scopus 로고
    • Impact of quantum mechanical effects on design of nano-scale narrow channel n- and p-type MOSFET's
    • H. Majima, Y. Saito, and T. Hiramoto, "Impact of quantum mechanical effects on design of nano-scale narrow channel n- and p-type MOSFET's," in IEDM Tech. Dig., 2001, pp. 733-736.
    • (2001) IEDM Tech. Dig. , pp. 733-736
    • Majima, H.1    Saito, Y.2    Hiramoto, T.3
  • 24
    • 0032070926 scopus 로고    scopus 로고
    • Semiconductor thickness effects in the double-gate SOI MOSFET
    • May
    • B. Majkusiak, T. Janik, and J. Walczak, "Semiconductor thickness effects in the double-gate SOI MOSFET," IEEE Trans. Electron Devices, vol. 45, pp. 1127-1134, May 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 1127-1134
    • Majkusiak, B.1    Janik, T.2    Walczak, J.3
  • 25
    • 0031145794 scopus 로고    scopus 로고
    • 50-nm channel nMOSFET/SIMOX with an ultrathin 2-or 6-nm thick silicon layer and their significant features of operations
    • May
    • Y. Omura, K. Kurihara, Y. Takahashi, T. Ishiyama, Y. Nakajima, and K. Izumi, "50-nm channel nMOSFET/SIMOX with an ultrathin 2- or 6-nm thick silicon layer and their significant features of operations," IEEE Electron Device Lett., vol. 18, pp. 190-193, May 1997.
    • (1997) IEEE Electron Device Lett. , vol.18 , pp. 190-193
    • Omura, Y.1    Kurihara, K.2    Takahashi, Y.3    Ishiyama, T.4    Nakajima, Y.5    Izumi, K.6
  • 28
    • 0035333634 scopus 로고    scopus 로고
    • Quantum-mechanical effects in SOI devices
    • B. Majkusiak, "Quantum-mechanical effects in SOI devices," Solid-State Electron., vol. 45, pp. 607-611, 2001.
    • (2001) Solid-State Electron. , vol.45 , pp. 607-611
    • Majkusiak, B.1
  • 29
    • 0033169528 scopus 로고    scopus 로고
    • A compact double-gate MOSFET model comprising quantum-mechanical and nonstatic effects
    • Aug.
    • G. Baccarani and S. Reggiani, "A compact double-gate MOSFET model comprising quantum-mechanical and nonstatic effects," IEEE Trans. Electron Devices, vol. 46, pp. 1127-1134, Aug. 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , pp. 1127-1134
    • Baccarani, G.1    Reggiani, S.2
  • 31
    • 0032284102 scopus 로고    scopus 로고
    • Device design considerations for double-gate, ground-plane, and single-gated ultra-thin SOI MOSFET's at the 25 nm channel length generation
    • H.-S. P. Wong, D. J. Frank, and P. M. Solomon, "Device design considerations for double-gate, ground-plane, and single-gated ultra-thin SOI MOSFET's at the 25 nm channel length generation," in IEDM Tech. Dig., 1998, pp. 407-410.
    • (1998) IEDM Tech. Dig. , pp. 407-410
    • Wong, H.-S.P.1    Frank, D.J.2    Solomon, P.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.