The behavior of narrow-width SOI MOSFET's with MESA isolation

IEEE Transactions on Electron Devices

Volumn 47, Issue 3, 2000, Pages 593-600

  Wang, Hongmei ^a   Chan, Mansun ^a   Wang, Yangyuan ^a   Ko, Ping K ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Mesa isolation; MOSFET; Narrow width effects; Silicon on insulator

Indexed keywords

ELECTRIC CURRENTS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

NARROW WIDTH EFFECTS;

MOSFET DEVICES;

EID: 0033884178     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.824735     Document Type: Article

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